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boron trichloride (BCl3) definition
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a colorless
gas
at room
temperature
and atmospheric
pressure
. Boron trichloride fumes in the presence of moist air and has a choking odor. This
gas
is used as a
gas
etchant
of
metals
such as aluminum. It also is used in boron
doping
. [SEMI C3.33-87]
See also:
bolometer definition
block-level definition
Biosensor definition
bottom protrusions definition
Bohr radius definition
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