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base end to first slot definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in quartz and high
temperature
wafer
carriers, the distance from either
end
of the
base
of a
wafer
carrier
to the first
slot
. [SEMI E2-86]
See also:
bevel angle definition
bar definition
best focus definition
base side to wafer center line definition
benzenium ions definition
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