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automatic shutoff (ASO) definition

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in gas source control equipment, a remotely actuated valve, preferably the cylinder valve, but possibly a valve located close to the cylinder valve, that can isolate the product as close to the cylinder valve as possible. It may also be a device that attaches to the cylinder valve stem or handle to close the valve. [SEMI F13-93]

See also:

background region definition
azonic acids:* definition
background counts definition
Atomic-fluorescence spectroscopy (AFS) definition
Band definition