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autodoping definition
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in the manufacture of silicon
epitaxial
wafers, the incorporation of
dopant
originating from the
substrate
into the
epitaxial
layer
. [SEMI M11-94 and ASTM F1241] Also called self-doping. Also see
doping
.
See also:
Atomic-absorption spectroscopy (AAS) definition
azomethines definition
background region definition
attribute definition
azeotrope definition
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