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1 : a physical standard against which a parameter is measured; for example, a test wafer used for testing parametric drift in a machine. Also called standard reference material. 2 : a superficial or unessential attribute of a process or characteristic under examination; for example, a piece of lint on a lens that appears through a microscope to be a defect on a die. 3 : in surface characterization, any contribution to an image from other than true surface morphology. Examples include contamination, vibration, electronic noise, and instrument imperfections.
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