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Z-direction definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in characterizing surface roughness, the direction perpendicular to the sample plane, orthogonal to the X and Y directions. Also called feature height direction.
See also:
yield model definition
X-ray photoelectron spectroscopy (XPS) definition
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