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X-ray lithography definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the use of X rays to
transfer
integrated
circuit
patterns from masks or reticles to resist-coated wafers.
See also:
Young’s modulus (E) definition
xylene definition
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