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SECS message subset definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the set of SECS-II messages required to define the scenarios. This selected
group
is smaller in number than the
current
SEMI SECS-II. [SEMI E30-94]
See also:
scoring definition
SAM definition
safe voltage definition
sc definition
scan length definition
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