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SECS message service (SMS) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in
communications
and
control
of
semiconductor
manufacturing equipment, a SEMI
standard
(SEMI E13) that provides an alternative to SECS-I to be used when sending SECS-II formatted messages over a network. [SEMI E30-94]
See also:
Saturated Hydrocarbons definition
secondary flat definition
scan direction definition
scratch definition
scaling laws definition
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