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Generic Equipment Model (GEM) definition
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1 : a generalized
model
that describes a recommended implementation of the SEMI
Equipment
Communications
Standard
II. 2 : in
communications
and
control
of
semiconductor
manufacturing equipment, a reference
model
for any
type
of
equipment
. It contains functionality that can apply to
most
equipment, but does not address unique requirements of specific
equipment
. [SEMI E30-94] Also see
equipment
model
and
specific equipment model
.
See also:
hand scribe mark definition
half-life, t1/2 (SI unit: s) definition
Haber-Weiss reaction definition
Half-Reaction definition
good field, fraction of definition
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