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GEM compliance definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in
communications
and
control
of
semiconductor
manufacturing equipment, adherence to the Generic
Equipment
Model
standard
for a specific
capability
. [Adapted from SEMI E30-94]
See also:
glycoproteins definition
guest definition
Gaussian broadening definition
hapto definition
goniometer definition
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