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EMO interface definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the location at which a
process
or
cassette
module
EMO cable is connected into the
cluster
tool
circuit
. [SEMI E20-91]
See also:
enthalpy of activation, Ho (SI unit: kJ mol-1) definition
embedded abrasive grains definition
Enantioenriched definition
enthalpy of activation, Ho (SI unit: kJ mol-1) definition
electropolish (EP) definition
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