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ELF-sensitive equipment definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
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X
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any
equipment
for which performance is adversely affected by extremely low
frequency
magnetic fields, such as a scanning
electron
microscope
. [SEMI E33-94]
See also:
Emulsifying Agent definition
Emulsifying Agent definition
energy definition
Enantiomerisation definition
eluent definition
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