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"zee" purge definition
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a
configuration
of purging manifold, similar to the"cross" purge, in which the purge
gas
inlet
valve
is connected to an inlet
port
of a three-ported, two-way
regulator
isolation
valve
. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer in print)]
See also:
X-ray photoelectron spectroscopy (XPS) definition
xanthene dyes definition
zeolite definition
xanthophylls definition
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